JPH0415230U - - Google Patents
Info
- Publication number
- JPH0415230U JPH0415230U JP5480890U JP5480890U JPH0415230U JP H0415230 U JPH0415230 U JP H0415230U JP 5480890 U JP5480890 U JP 5480890U JP 5480890 U JP5480890 U JP 5480890U JP H0415230 U JPH0415230 U JP H0415230U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- electrode
- holder
- claw
- claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5480890U JPH0415230U (en]) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5480890U JPH0415230U (en]) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415230U true JPH0415230U (en]) | 1992-02-06 |
Family
ID=31577202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5480890U Pending JPH0415230U (en]) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415230U (en]) |
-
1990
- 1990-05-25 JP JP5480890U patent/JPH0415230U/ja active Pending